Abstract
The atomic force microscope (AFM) can now bridge the gap from imaging objects that can be seen with an optical microscope to imaging atoms: a range in magnification of 104. High magnification images of germanium show single atoms separated by 0.4 nm while low magnification images of entire cells and portions of an integrated circuit chip provide lateral and vertical information over a range of 25 um.
Original language | English (US) |
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Pages (from-to) | 369-373 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 8 |
Issue number | 1 |
DOIs | |
State | Published - Jan 1990 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films