Abstract
To reduce the environmental errors, a snapshot phase-shifting interference microscope (SPSIM) has been developed for surface roughness measurement. However, fringe-print-through (FPT) error widely exists in the phase-shifting interferometry (PSI). To ensure the measurement accuracy, we analyze the sources which introduce the FPT error in the SPSIM. We also develop a FPT error correction algorithm which can be used in the different intensity distribution conditions. The simulation and experiment verify the correctness and feasibility of the FPT error correction algorithm.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 26554-26566 |
| Number of pages | 13 |
| Journal | Optics Express |
| Volume | 25 |
| Issue number | 22 |
| DOIs | |
| State | Published - Oct 30 2017 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics