TY - JOUR
T1 - Focusing membrane metamirrors for integrated cavity optomechanics
AU - Agrawal, A. R.
AU - Manley, J.
AU - Allepuz-Requena, D.
AU - Wilson, D. J.
N1 - Publisher Copyright:
© 2024 Optica Publishing Group.
PY - 2024/9/20
Y1 - 2024/9/20
N2 - Membrane-based cavity optomechanical systems have been widely successful; however, their chip-scale integration remains a significant challenge. Here we present a solution based on metasurface design. Specifically, by non-periodic photonic crystal patterning of a Si3N4 membrane, we realize a suspended metamirror with a finite focal length, enabling formation of a stable optical cavity with a plane end-mirror. We present simulation, fabrication, and characterization of the metamirror using both free-space and cavity-based measurements, demonstrating reflectivities as high as 99% and cavity finesse as high as 600. The mirror radius of curvature (∼30 cm) is inferred from the cavity mode spectrum. In combination with phononic engineering, focusing membrane mirrors offer a route towards high-cooperativity, vertically integrated cavity optomechanical systems with applications ranging from precision force sensing to hybrid quantum transduction.
AB - Membrane-based cavity optomechanical systems have been widely successful; however, their chip-scale integration remains a significant challenge. Here we present a solution based on metasurface design. Specifically, by non-periodic photonic crystal patterning of a Si3N4 membrane, we realize a suspended metamirror with a finite focal length, enabling formation of a stable optical cavity with a plane end-mirror. We present simulation, fabrication, and characterization of the metamirror using both free-space and cavity-based measurements, demonstrating reflectivities as high as 99% and cavity finesse as high as 600. The mirror radius of curvature (∼30 cm) is inferred from the cavity mode spectrum. In combination with phononic engineering, focusing membrane mirrors offer a route towards high-cooperativity, vertically integrated cavity optomechanical systems with applications ranging from precision force sensing to hybrid quantum transduction.
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U2 - 10.1364/OPTICA.522509
DO - 10.1364/OPTICA.522509
M3 - Article
AN - SCOPUS:85204607377
SN - 2334-2536
VL - 11
SP - 1235
EP - 1241
JO - Optica
JF - Optica
IS - 9
ER -