Focused ion beam lithography of multiperiod gratings for a wavelength-division-multiplexed transmitter laser array

I. M. Templeton; M. Fallahi; L. E. Erickson; F. Chatenoud; E. S. Koteles; H. G. Champion; J. J. He; R. Barber

doi:10.1116/1.588252

Focused ion beam lithography of multiperiod gratings for a wavelength-division-multiplexed transmitter laser array

I. M. Templeton, M. Fallahi, L. E. Erickson, F. Chatenoud, E. S. Koteles, H. G. Champion, J. J. He, R. Barber

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

This paper demonstrates the design, construction, and performance of a monolithically integrated wavelength-division-multiplexed transmitter module having ten distributed-Bragg-reflector (DBR) laser diodes operating at predefined frequencies in the 0.98μm to 1.0μm range with a frequency separation of about 2nm. The DBR gratings are written by focused ion beam lithography with manual stepping of the x-deflection gain to produce the required variation of period.

Original language	English (US)
Pages (from-to)	2722-2724
Number of pages	3
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	13
Issue number	6
DOIs	https://doi.org/10.1116/1.588252
State	Published - Nov 1995
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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Templeton, I. M., Fallahi, M., Erickson, L. E., Chatenoud, F., Koteles, E. S., Champion, H. G., He, J. J., & Barber, R. (1995). Focused ion beam lithography of multiperiod gratings for a wavelength-division-multiplexed transmitter laser array. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 13(6), 2722-2724. https://doi.org/10.1116/1.588252

Templeton, IM, Fallahi, M, Erickson, LE, Chatenoud, F, Koteles, ES, Champion, HG, He, JJ & Barber, R 1995, 'Focused ion beam lithography of multiperiod gratings for a wavelength-division-multiplexed transmitter laser array', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 13, no. 6, pp. 2722-2724. https://doi.org/10.1116/1.588252

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AU - Chatenoud, F.

AU - Koteles, E. S.

AU - Champion, H. G.

AU - He, J. J.

AU - Barber, R.

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Focused ion beam lithography of multiperiod gratings for a wavelength-division-multiplexed transmitter laser array

Abstract

ASJC Scopus subject areas

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