@inproceedings{84da428a4e1742f5818c601836b967d0,
title = "Focused beam scatterometry for deep subwavelength metrology",
abstract = "It is known that far-field scattered light requires a priori sample information in order to reconstruct nm-scale information such as is required in semiconductor metrology. We describe an approach to scatterometry that uses unconventional polarization states in the pupil of a high NA objective lens. We call this focused beam scatterometry; we will discuss the sensitivity limits to this approach and how it relates to micro-ellipsometry as well as low-NA scatterometry.",
keywords = "Microscopy, Polarization Control, Pupil Engineering, Spatial Light Modulators",
author = "Brown, {Thomas G.} and Alonso, {Miguel A.} and Anthony Vella and Theisen, {Michael J.} and Head, {Stephen T.} and Gillmer, {Steven R.} and Ellis, {Jonathan D.}",
year = "2014",
doi = "10.1117/12.2045651",
language = "English (US)",
isbn = "9780819498625",
series = "Progress in Biomedical Optics and Imaging - Proceedings of SPIE",
publisher = "SPIE",
booktitle = "Three-Dimensional and Multidimensional Microscopy",
note = "Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI ; Conference date: 03-02-2014 Through 06-02-2014",
}