@inproceedings{3b6ef294135a4e6d83a0bfed30e5bec3,
title = "Flexible micro-optics fabrication by direct laser writing toward CMOS compatible 3D optical circuit",
abstract = "We demonstrated a 45 degree micro mirror by a direct laser writing method. A flat, smooth and clearly defined mirror surface has been fabricated despite of the finite size and long tail of the point spread function of the exposure tool.",
author = "Chris Summitt and Sunglin Wang and Lee Johnson and Melissa Zaverton and Tom Milster and Yuzuru Takashima",
year = "2013",
doi = "10.1117/12.2004996",
language = "English (US)",
isbn = "9780819493828",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI",
note = "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI ; Conference date: 05-02-2013 Through 06-02-2013",
}