Abstract
An anodic bond is modeled as a moving nonmaterial line forming the intersection of three material surfaces representing the unbonded conductor, the unbonded insulator, and the bonded interface. The component mass balance equations, Gauss' law, and the linear momentum equations are placed in a finite element formulation, which is used to predict the evolution of the sodium ion concentration, electric potential, and stress during anodic bonding of Pyrex glass and silicon.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 306-318 |
| Number of pages | 13 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3992 |
| State | Published - 2000 |
| Event | Smart Structures and Materials 2000 - Active Materials: Behavior and Mechanics - Newport Beach, CA, USA Duration: Mar 6 2000 → Mar 9 2000 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering