Femtosecond laser micromachining on backside of glass using simultaneously spatially and temporally focused vortex beams

Liu Xiaolong, Weibo Cheng, Pavel Polynkin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Femtosecond laser micromachining on back surface have been investigated experimentally using simultaneously spatially and temporally focused (SSTF) vortex beams. Uniform ring-shape ablations have been made on back surface of borosilicate glass. The feasibility of laser micromachining using femtosecond SSTF vortex beam has been demonstrated.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781509062904
StatePublished - 2017
EventConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 - Singapore, Singapore
Duration: Jul 31 2017Aug 4 2017

Publication series

NameOptics InfoBase Conference Papers
VolumePart F122-CLEOPR 2017
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
Country/TerritorySingapore
CitySingapore
Period7/31/178/4/17

Keywords

  • Laser micromachining
  • Simultaneously spatially and temporally focused beam
  • Vortex beam

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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