Feasibility of real-time detection of abnormality in inter layer dielectric slurry during chemical mechanical planarization using frictional analysis

Yasa Sampurno, Fransisca Sudargho, Yun Zhuang, Michael Goldstein, Ara Philipossian

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Fingerprint

Dive into the research topics of 'Feasibility of real-time detection of abnormality in inter layer dielectric slurry during chemical mechanical planarization using frictional analysis'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering