Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization

G. Teowee; E. L. Quackenbush; C. D. Baertlein; J. M. Boulton; D. R. Uhlmann

Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization

G. Teowee, E. L. Quackenbush, C. D. Baertlein, J. M. Boulton, D. R. Uhlmann

Research output: Contribution to conference › Paper › peer-review

Abstract

The PZT-substrate or PZT-electrode interface can affect the FE properties and specifically the fatigue behaviour. Typical Pt-PZT-Pt capacitors exhibited fatigue resistance up to 10^x - 10⁹ cycles, while RuO₂, La_0.5Sr_0.5CoO₃ and YBa₂Cu₃O₇ electrodes have been reported in literature to yield fatigue-free devices up to 10¹¹ - 10¹² cycles. In an early study which compared the fatigue behaviour of bulk PLZT ceramics with various metal electrodes, it was found that in offered the best fatigue performance (up to 10⁹ cycles). A series of sol-gel derived PZT 53/47 films were fired to 700C to achieve single-phase FE perovskite films. Bottom electrode (or the substrate) consisted of sputtered Pt on oxidized Si wafers. Monolithic capacitors were obtained by depositing top electrodes of Ag, Au, Au-Pd, Pd and Pt. All the capacitors exhibited fatigue, manifested by lower values of P_r, E_c and ε_r but higher leakage currents after cycling.

Original language	English (US)
Pages	523-526
Number of pages	4
State	Published - 1994
Event	Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics - University Park, PA, USA Duration: Aug 7 1994 → Aug 10 1994

Other

Other	Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics
City	University Park, PA, USA
Period	8/7/94 → 8/10/94

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

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title = "Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization",

abstract = "The PZT-substrate or PZT-electrode interface can affect the FE properties and specifically the fatigue behaviour. Typical Pt-PZT-Pt capacitors exhibited fatigue resistance up to 10x - 109 cycles, while RuO2, La0.5Sr0.5CoO3 and YBa2Cu3O7 electrodes have been reported in literature to yield fatigue-free devices up to 1011 - 1012 cycles. In an early study which compared the fatigue behaviour of bulk PLZT ceramics with various metal electrodes, it was found that in offered the best fatigue performance (up to 109 cycles). A series of sol-gel derived PZT 53/47 films were fired to 700C to achieve single-phase FE perovskite films. Bottom electrode (or the substrate) consisted of sputtered Pt on oxidized Si wafers. Monolithic capacitors were obtained by depositing top electrodes of Ag, Au, Au-Pd, Pd and Pt. All the capacitors exhibited fatigue, manifested by lower values of Pr, Ec and εr but higher leakage currents after cycling.",

author = "G. Teowee and Quackenbush, {E. L.} and Baertlein, {C. D.} and Boulton, {J. M.} and Uhlmann, {D. R.}",

year = "1994",

language = "English (US)",

pages = "523--526",

note = "Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics ; Conference date: 07-08-1994 Through 10-08-1994",

}

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T1 - Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization

AU - Teowee, G.

AU - Quackenbush, E. L.

AU - Baertlein, C. D.

AU - Boulton, J. M.

AU - Uhlmann, D. R.

PY - 1994

Y1 - 1994

N2 - The PZT-substrate or PZT-electrode interface can affect the FE properties and specifically the fatigue behaviour. Typical Pt-PZT-Pt capacitors exhibited fatigue resistance up to 10x - 109 cycles, while RuO2, La0.5Sr0.5CoO3 and YBa2Cu3O7 electrodes have been reported in literature to yield fatigue-free devices up to 1011 - 1012 cycles. In an early study which compared the fatigue behaviour of bulk PLZT ceramics with various metal electrodes, it was found that in offered the best fatigue performance (up to 109 cycles). A series of sol-gel derived PZT 53/47 films were fired to 700C to achieve single-phase FE perovskite films. Bottom electrode (or the substrate) consisted of sputtered Pt on oxidized Si wafers. Monolithic capacitors were obtained by depositing top electrodes of Ag, Au, Au-Pd, Pd and Pt. All the capacitors exhibited fatigue, manifested by lower values of Pr, Ec and εr but higher leakage currents after cycling.

AB - The PZT-substrate or PZT-electrode interface can affect the FE properties and specifically the fatigue behaviour. Typical Pt-PZT-Pt capacitors exhibited fatigue resistance up to 10x - 109 cycles, while RuO2, La0.5Sr0.5CoO3 and YBa2Cu3O7 electrodes have been reported in literature to yield fatigue-free devices up to 1011 - 1012 cycles. In an early study which compared the fatigue behaviour of bulk PLZT ceramics with various metal electrodes, it was found that in offered the best fatigue performance (up to 109 cycles). A series of sol-gel derived PZT 53/47 films were fired to 700C to achieve single-phase FE perovskite films. Bottom electrode (or the substrate) consisted of sputtered Pt on oxidized Si wafers. Monolithic capacitors were obtained by depositing top electrodes of Ag, Au, Au-Pd, Pd and Pt. All the capacitors exhibited fatigue, manifested by lower values of Pr, Ec and εr but higher leakage currents after cycling.

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M3 - Paper

AN - SCOPUS:0028706463

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T2 - Proceedings of the 1994 9th IEEE International Symposium on Applications of Ferroelectrics

Y2 - 7 August 1994 through 10 August 1994

ER -

Fatigue and retention behaviors of Pt-PZT-metal capacitors with various top metallization

Abstract

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ASJC Scopus subject areas

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