TY - GEN
T1 - Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer
AU - Wang, Daodang
AU - Wang, Zhichao
AU - Liang, Rongguang
AU - Kong, Ming
AU - Zhao, Jun
AU - Zhao, Jufeng
AU - Mo, Linhai
AU - Li, Wei
N1 - Funding Information:
The activities of this work are supported by Zhejiang Provincial Natural Science Foundation of China (LY17E050014, LY13E060006, Q14E060016), National Natural Science Foundation of China (NSFC) (11404312, 51476154, 51404223, 51375467), Zhejiang Key Discipline of Instrument Science and Technology (JL150508, JL150502), Guangxi Key Laboratory of Automatic Detecting Technology and Instruments (YQ15204), and Guangxi Colleges and Universities Key Laboratory of Optoelectronic Information Processing (KFJJ2014-03).
Publisher Copyright:
© 2017 SPIE.
PY - 2017
Y1 - 2017
N2 - The submicron-aperture fiber point-diffraction interferometer (SFPDI) can be applied to realize the measurement of three-dimensional absolute displacement within large range, in which the performance of point-diffraction wavefront and numerical iterative algorithm for displacement reconstruction determines the achievable measurement accuracy, reliability and efficiency of the system. A method based on fast searching particle swarm optimization (FS-PSO) algorithm is proposed to realize the rapid measurement of three-dimensional absolute displacement. Based on the SFPDI with two submicron-aperture fiber pairs, FS-PSO method and the corresponding model of the SFPDI, the measurement accuracy, reliability and efficiency of the SFPDI system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. The error of pointdiffraction wavefront obtained in the experiment is in the order of 1×10-4 (the wavelength is 532 nm), and the corresponding displacement measurement error is smaller than 0.03 μm. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed SFPDI system, high measurement accuracy in the order of 0.1 μm, convergence rate (∼90.0%) and efficiency have been realized with the proposed method, providing a feasible way to measure three-dimensional absolute displacement in the case of no guide rail.
AB - The submicron-aperture fiber point-diffraction interferometer (SFPDI) can be applied to realize the measurement of three-dimensional absolute displacement within large range, in which the performance of point-diffraction wavefront and numerical iterative algorithm for displacement reconstruction determines the achievable measurement accuracy, reliability and efficiency of the system. A method based on fast searching particle swarm optimization (FS-PSO) algorithm is proposed to realize the rapid measurement of three-dimensional absolute displacement. Based on the SFPDI with two submicron-aperture fiber pairs, FS-PSO method and the corresponding model of the SFPDI, the measurement accuracy, reliability and efficiency of the SFPDI system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. The error of pointdiffraction wavefront obtained in the experiment is in the order of 1×10-4 (the wavelength is 532 nm), and the corresponding displacement measurement error is smaller than 0.03 μm. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed SFPDI system, high measurement accuracy in the order of 0.1 μm, convergence rate (∼90.0%) and efficiency have been realized with the proposed method, providing a feasible way to measure three-dimensional absolute displacement in the case of no guide rail.
KW - Absolute displacement measurement
KW - fast searching particle swarm algorithm
KW - point-diffraction interferometer
KW - spherical wavefront error
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U2 - 10.1117/12.2268052
DO - 10.1117/12.2268052
M3 - Conference contribution
AN - SCOPUS:85029170798
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Measurement Systems for Industrial Inspection X
A2 - Lehmann, Peter
A2 - Goncalves, Armando Albertazzi
A2 - Osten, Wolfgang
PB - SPIE
T2 - Optical Measurement Systems for Industrial Inspection X 2017
Y2 - 26 June 2017 through 29 June 2017
ER -