Abstract
A micro-optoelectromechanical switch that combines microactuator technology developed via the Lithographie Galvanformung Abformung process with lithographically defined polymeric alignment elements is described. The multimode optical switch achieves submillisecond switching times, low insertion loss (<1 dB), low cross talk (<70 dB), low voltage (3 V), and wavelength independence.
Original language | English (US) |
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Pages (from-to) | 3187-3189 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 73 |
Issue number | 22 |
DOIs | |
State | Published - 1998 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)