Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography

Chris Summitt; Sunglin Wang; Soha Namnabat; Lee Johnson; Tom Milster; Yuzuru Takashima

doi:10.1364/OE.25.017960

Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography

Chris Summitt, Sunglin Wang, Soha Namnabat, Lee Johnson, Tom Milster, Yuzuru Takashima

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

We report a fabrication process of a polymer, and mirror-based out-of-plane optical coupler. In the process, a pre-formed mirror blank made of a buffer coat material is re-exposed by a laser direct writing tool with low numerical aperture of 0.1. The fabrication process is inherently fast because of the low numerical aperture (NA) process. The surface figure of the mirror is controlled under 0.04 waves in root-mean-square (RMS) at 1.55 μm wavelength, with mirror angle of 45 ± 1 degrees. Nominal insertion loss of 8.5dB of the mirror-based coupler was confirmed with polymer waveguides fabricated simultaneously.

Original language	English (US)
Pages (from-to)	17960-17970
Number of pages	11
Journal	Optics Express
Volume	25
Issue number	15
DOIs	https://doi.org/10.1364/OE.25.017960
State	Published - Jul 24 2017

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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title = "Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography",

abstract = "We report a fabrication process of a polymer, and mirror-based out-of-plane optical coupler. In the process, a pre-formed mirror blank made of a buffer coat material is re-exposed by a laser direct writing tool with low numerical aperture of 0.1. The fabrication process is inherently fast because of the low numerical aperture (NA) process. The surface figure of the mirror is controlled under 0.04 waves in root-mean-square (RMS) at 1.55 μm wavelength, with mirror angle of 45 ± 1 degrees. Nominal insertion loss of 8.5dB of the mirror-based coupler was confirmed with polymer waveguides fabricated simultaneously.",

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AU - Summitt, Chris

AU - Wang, Sunglin

AU - Namnabat, Soha

AU - Johnson, Lee

AU - Milster, Tom

AU - Takashima, Yuzuru

PY - 2017/7/24

Y1 - 2017/7/24

N2 - We report a fabrication process of a polymer, and mirror-based out-of-plane optical coupler. In the process, a pre-formed mirror blank made of a buffer coat material is re-exposed by a laser direct writing tool with low numerical aperture of 0.1. The fabrication process is inherently fast because of the low numerical aperture (NA) process. The surface figure of the mirror is controlled under 0.04 waves in root-mean-square (RMS) at 1.55 μm wavelength, with mirror angle of 45 ± 1 degrees. Nominal insertion loss of 8.5dB of the mirror-based coupler was confirmed with polymer waveguides fabricated simultaneously.

AB - We report a fabrication process of a polymer, and mirror-based out-of-plane optical coupler. In the process, a pre-formed mirror blank made of a buffer coat material is re-exposed by a laser direct writing tool with low numerical aperture of 0.1. The fabrication process is inherently fast because of the low numerical aperture (NA) process. The surface figure of the mirror is controlled under 0.04 waves in root-mean-square (RMS) at 1.55 μm wavelength, with mirror angle of 45 ± 1 degrees. Nominal insertion loss of 8.5dB of the mirror-based coupler was confirmed with polymer waveguides fabricated simultaneously.

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Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography

Abstract

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