Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography

Chris Summitt, Sunglin Wang, Soha Namnabat, Lee Johnson, Tom Milster, Yuzuru Takashima

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


We report a fabrication process of a polymer, and mirror-based out-of-plane optical coupler. In the process, a pre-formed mirror blank made of a buffer coat material is re-exposed by a laser direct writing tool with low numerical aperture of 0.1. The fabrication process is inherently fast because of the low numerical aperture (NA) process. The surface figure of the mirror is controlled under 0.04 waves in root-mean-square (RMS) at 1.55 μm wavelength, with mirror angle of 45 ± 1 degrees. Nominal insertion loss of 8.5dB of the mirror-based coupler was confirmed with polymer waveguides fabricated simultaneously.

Original languageEnglish (US)
Pages (from-to)17960-17970
Number of pages11
JournalOptics Express
Issue number15
StatePublished - Jul 24 2017

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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