Fabrication of thin-film micropolarizer arrays for visible imaging polarimetry

Junpeng Guo, David Brady

Research output: Contribution to journalArticlepeer-review

82 Scopus citations

Abstract

We describe a microfabrication process for fabricating micropolarizer devices with polarization thin film. The polarization film is less than a 0.5 µm thick and can have a polarization extinction ratio of ∼330 in the visible wavelength range. A single-state micropolarizer array with polarizing pixels as small as 5 µm × 5 µm has been fabricated. A multilayer spatially multiplexed three-state micropolarizer line array with a 14.4-µm resolution has also been fabricated for visible imaging polarimetry application.

Original languageEnglish (US)
Pages (from-to)1486-1492
Number of pages7
JournalApplied optics
Volume39
Issue number10
DOIs
StatePublished - Apr 1 2000
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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