Fabrication of hybrid sol-gel glass diffractive elements

J. T. Rantala; P. Ayras; R. Levy; M. R. Descour; S. Honkanen; N. Peyghambarian

doi:10.1117/12.343732

Fabrication of hybrid sol-gel glass diffractive elements

J. T. Rantala, P. Ayras, R. Levy, M. R. Descour, S. Honkanen, N. Peyghambarian

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

Organically modified photosensitive hybrid glasses are synthesized and used for the fabrication of diffractive optical elements. The material synthesis is based on a sol-gel process. The materials are spin-deposited onto glass substrates that also have a significant role in the component assembly. The synthesised material has a negative tone property under UV-radiation and they can be patterned by a conventional UV-lithography process. Binary diffractive lenses are photoimprinted through an amplitude contact mask. Optical properties and surface roughness of the materials and elements are evaluated. Diffraction efficiencies of the elements are also measured. The process and material optimization for the reliable fabrication of integrated optics devices is carried out.

Original language	English (US)
Pages (from-to)	212-218
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3620
DOIs	https://doi.org/10.1117/12.343732
State	Published - 1999
Event	Proceedings of the 1999 Integrated Optics Devices III - San Jose, CA, USA Duration: Jan 25 1999 → Jan 27 1999

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.343732

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title = "Fabrication of hybrid sol-gel glass diffractive elements",

abstract = "Organically modified photosensitive hybrid glasses are synthesized and used for the fabrication of diffractive optical elements. The material synthesis is based on a sol-gel process. The materials are spin-deposited onto glass substrates that also have a significant role in the component assembly. The synthesised material has a negative tone property under UV-radiation and they can be patterned by a conventional UV-lithography process. Binary diffractive lenses are photoimprinted through an amplitude contact mask. Optical properties and surface roughness of the materials and elements are evaluated. Diffraction efficiencies of the elements are also measured. The process and material optimization for the reliable fabrication of integrated optics devices is carried out.",

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AU - Rantala, J. T.

AU - Ayras, P.

AU - Levy, R.

AU - Descour, M. R.

AU - Honkanen, S.

AU - Peyghambarian, N.

PY - 1999

Y1 - 1999

N2 - Organically modified photosensitive hybrid glasses are synthesized and used for the fabrication of diffractive optical elements. The material synthesis is based on a sol-gel process. The materials are spin-deposited onto glass substrates that also have a significant role in the component assembly. The synthesised material has a negative tone property under UV-radiation and they can be patterned by a conventional UV-lithography process. Binary diffractive lenses are photoimprinted through an amplitude contact mask. Optical properties and surface roughness of the materials and elements are evaluated. Diffraction efficiencies of the elements are also measured. The process and material optimization for the reliable fabrication of integrated optics devices is carried out.

AB - Organically modified photosensitive hybrid glasses are synthesized and used for the fabrication of diffractive optical elements. The material synthesis is based on a sol-gel process. The materials are spin-deposited onto glass substrates that also have a significant role in the component assembly. The synthesised material has a negative tone property under UV-radiation and they can be patterned by a conventional UV-lithography process. Binary diffractive lenses are photoimprinted through an amplitude contact mask. Optical properties and surface roughness of the materials and elements are evaluated. Diffraction efficiencies of the elements are also measured. The process and material optimization for the reliable fabrication of integrated optics devices is carried out.

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Fabrication of hybrid sol-gel glass diffractive elements

Abstract

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