Fabrication of hybrid sol-gel glass diffractive elements

J. T. Rantala, P. Ayras, R. Levy, M. R. Descour, S. Honkanen, N. Peyghambarian

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


Organically modified photosensitive hybrid glasses are synthesized and used for the fabrication of diffractive optical elements. The material synthesis is based on a sol-gel process. The materials are spin-deposited onto glass substrates that also have a significant role in the component assembly. The synthesised material has a negative tone property under UV-radiation and they can be patterned by a conventional UV-lithography process. Binary diffractive lenses are photoimprinted through an amplitude contact mask. Optical properties and surface roughness of the materials and elements are evaluated. Diffraction efficiencies of the elements are also measured. The process and material optimization for the reliable fabrication of integrated optics devices is carried out.

Original languageEnglish (US)
Pages (from-to)212-218
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1999
EventProceedings of the 1999 Integrated Optics Devices III - San Jose, CA, USA
Duration: Jan 25 1999Jan 27 1999

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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