Fabrication of high-Q microresonators using femtosecond laser micromachining

Kazunari Tada; Gregory A. Cohoon; Khanh Kieu; Masud Mansuripur; Robert A. Norwood

doi:10.1109/LPT.2013.2240382

Fabrication of high-Q microresonators using femtosecond laser micromachining

Kazunari Tada, Gregory A. Cohoon, Khanh Kieu, Masud Mansuripur, Robert A. Norwood

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

We report a technique to fabricate whispering gallery mode microdisk resonators using femtosecond laser micromachining and a heat reflow process to improve the optical quality of the resonator. The fabricated resonators have suppressed higher order modes with a measured Q-factor as high as 7.2× 10⁶. The described fabrication process, which relies on material non-thermal laser ablation, offers the ability to fabricate microresonators using a wide variety of materials of nearly any dimensional size or shape.

Original language	English (US)
Article number	6412717
Pages (from-to)	430-433
Number of pages	4
Journal	IEEE Photonics Technology Letters
Volume	25
Issue number	5
DOIs	https://doi.org/10.1109/LPT.2013.2240382
State	Published - 2013

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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abstract = "We report a technique to fabricate whispering gallery mode microdisk resonators using femtosecond laser micromachining and a heat reflow process to improve the optical quality of the resonator. The fabricated resonators have suppressed higher order modes with a measured Q-factor as high as 7.2× 106. The described fabrication process, which relies on material non-thermal laser ablation, offers the ability to fabricate microresonators using a wide variety of materials of nearly any dimensional size or shape.",

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AU - Cohoon, Gregory A.

AU - Kieu, Khanh

AU - Mansuripur, Masud

AU - Norwood, Robert A.

PY - 2013

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AB - We report a technique to fabricate whispering gallery mode microdisk resonators using femtosecond laser micromachining and a heat reflow process to improve the optical quality of the resonator. The fabricated resonators have suppressed higher order modes with a measured Q-factor as high as 7.2× 106. The described fabrication process, which relies on material non-thermal laser ablation, offers the ability to fabricate microresonators using a wide variety of materials of nearly any dimensional size or shape.

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Fabrication of high-Q microresonators using femtosecond laser micromachining

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