@inproceedings{cc93070a7eed4cd3b72a0715685528fc,
title = "Fabrication of high-Q microresonators using femtosecond laser micromachining",
abstract = "We report a novel technique to fabricate microdisk resonators using femtosecond laser micromachining. The resonators had suppressed higher order modes with a measured Q-factor as high as 7.8 × 106.",
author = "Kazunari Tada and Gregory Cohoon and Khanh Kieu and Masud Mansuripur and Norwood, {Robert A.}",
year = "2012",
doi = "10.1364/cleo_si.2012.cm1m.6",
language = "English (US)",
isbn = "9781557529435",
series = "CLEO: Science and Innovations, CLEO_SI 2012",
publisher = "Optical Society of America (OSA)",
pages = "CM1M.6",
booktitle = "CLEO",
note = "CLEO: Science and Innovations, CLEO_SI 2012 ; Conference date: 06-05-2012 Through 11-05-2012",
}