Fabrication of high-Q microresonators using femtosecond laser micromachining

Kazunari Tada, Gregory A. Cohoon, Khanh Kieu, Masud Mansuripur, Robert A. Norwood

Research output: Contribution to journalArticlepeer-review

15 Scopus citations


We report a technique to fabricate whispering gallery mode microdisk resonators using femtosecond laser micromachining and a heat reflow process to improve the optical quality of the resonator. The fabricated resonators have suppressed higher order modes with a measured Q-factor as high as 7.2× 106. The described fabrication process, which relies on material non-thermal laser ablation, offers the ability to fabricate microresonators using a wide variety of materials of nearly any dimensional size or shape.

Original languageEnglish (US)
Article number6412717
Pages (from-to)430-433
Number of pages4
JournalIEEE Photonics Technology Letters
Issue number5
StatePublished - 2013

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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