Fabrication of high-Q microresonators using femtosecond laser micromachining

Kazunari Tada; Gregory A. Cohoon; Khanh Kieu; Masud Mansuripur; Robert A. Norwood

doi:10.1109/LPT.2013.2240382

Fabrication of high-Q microresonators using femtosecond laser micromachining

Kazunari Tada, Gregory A. Cohoon, Khanh Kieu, Masud Mansuripur, Robert A. Norwood

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

We report a technique to fabricate whispering gallery mode microdisk resonators using femtosecond laser micromachining and a heat reflow process to improve the optical quality of the resonator. The fabricated resonators have suppressed higher order modes with a measured Q-factor as high as 7.2× 10⁶. The described fabrication process, which relies on material non-thermal laser ablation, offers the ability to fabricate microresonators using a wide variety of materials of nearly any dimensional size or shape.

Original language	English (US)
Article number	6412717
Pages (from-to)	430-433
Number of pages	4
Journal	IEEE Photonics Technology Letters
Volume	25
Issue number	5
DOIs	https://doi.org/10.1109/LPT.2013.2240382
State	Published - 2013

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

Access to Document

10.1109/LPT.2013.2240382

Cite this

@article{98cc7d83009e41529116a183f906feb0,

title = "Fabrication of high-Q microresonators using femtosecond laser micromachining",

abstract = "We report a technique to fabricate whispering gallery mode microdisk resonators using femtosecond laser micromachining and a heat reflow process to improve the optical quality of the resonator. The fabricated resonators have suppressed higher order modes with a measured Q-factor as high as 7.2× 106. The described fabrication process, which relies on material non-thermal laser ablation, offers the ability to fabricate microresonators using a wide variety of materials of nearly any dimensional size or shape.",

author = "Kazunari Tada and Cohoon, {Gregory A.} and Khanh Kieu and Masud Mansuripur and Norwood, {Robert A.}",

year = "2013",

doi = "10.1109/LPT.2013.2240382",

language = "English (US)",

volume = "25",

pages = "430--433",

journal = "IEEE Photonics Technology Letters",

issn = "1041-1135",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "5",

}

TY - JOUR

T1 - Fabrication of high-Q microresonators using femtosecond laser micromachining

AU - Tada, Kazunari

AU - Cohoon, Gregory A.

AU - Kieu, Khanh

AU - Mansuripur, Masud

AU - Norwood, Robert A.

PY - 2013

Y1 - 2013

N2 - We report a technique to fabricate whispering gallery mode microdisk resonators using femtosecond laser micromachining and a heat reflow process to improve the optical quality of the resonator. The fabricated resonators have suppressed higher order modes with a measured Q-factor as high as 7.2× 106. The described fabrication process, which relies on material non-thermal laser ablation, offers the ability to fabricate microresonators using a wide variety of materials of nearly any dimensional size or shape.

AB - We report a technique to fabricate whispering gallery mode microdisk resonators using femtosecond laser micromachining and a heat reflow process to improve the optical quality of the resonator. The fabricated resonators have suppressed higher order modes with a measured Q-factor as high as 7.2× 106. The described fabrication process, which relies on material non-thermal laser ablation, offers the ability to fabricate microresonators using a wide variety of materials of nearly any dimensional size or shape.

UR - http://www.scopus.com/inward/record.url?scp=84873636943&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84873636943&partnerID=8YFLogxK

U2 - 10.1109/LPT.2013.2240382

DO - 10.1109/LPT.2013.2240382

M3 - Article

AN - SCOPUS:84873636943

SN - 1041-1135

VL - 25

SP - 430

EP - 433

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

IS - 5

M1 - 6412717

ER -

Fabrication of high-Q microresonators using femtosecond laser micromachining

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this