Fabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner

J. R. Wendt; T. W. Krygowski; G. A. Vawter; O. Blum; W. C. Sweatt; M. E. Warren; D. Reyes

doi:10.1116/1.1313580

Fabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner

J. R. Wendt, T. W. Krygowski, G. A. Vawter, O. Blum, W. C. Sweatt, M. E. Warren, D. Reyes

Research output: Contribution to journal › Conference article › peer-review

5 Scopus citations

Abstract

A multilevel diffractive optical element (DOE) was microfabricated onto a microelectromechanical system (MEMS) in an integrated compact optical MEMS laser scanner. Electron beam lithography was used to pattern and reactive-ion-beam etching was used to etch the microlens. This experiment was believed to be a significant step to achieve a wide range of integrated microsystems.

Original language	English (US)
Pages (from-to)	3608-3611
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	18
Issue number	6
DOIs	https://doi.org/10.1116/1.1313580
State	Published - Nov 2000
Externally published	Yes
Event	44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - Rancho Mirage, CA, USA Duration: May 30 2000 → Jun 2 2000

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1313580

Cite this

Fabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner. / Wendt, J. R.; Krygowski, T. W.; Vawter, G. A. et al.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 18, No. 6, 11.2000, p. 3608-3611.

Research output: Contribution to journal › Conference article › peer-review

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abstract = "A multilevel diffractive optical element (DOE) was microfabricated onto a microelectromechanical system (MEMS) in an integrated compact optical MEMS laser scanner. Electron beam lithography was used to pattern and reactive-ion-beam etching was used to etch the microlens. This experiment was believed to be a significant step to achieve a wide range of integrated microsystems.",

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AU - Blum, O.

AU - Sweatt, W. C.

AU - Warren, M. E.

AU - Reyes, D.

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AB - A multilevel diffractive optical element (DOE) was microfabricated onto a microelectromechanical system (MEMS) in an integrated compact optical MEMS laser scanner. Electron beam lithography was used to pattern and reactive-ion-beam etching was used to etch the microlens. This experiment was believed to be a significant step to achieve a wide range of integrated microsystems.

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Fabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner

Abstract

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