Fabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner

J. R. Wendt; T. W. Krygowski; G. A. Vawter; O. Blum; W. C. Sweatt; M. E. Warren; D. Reyes

doi:10.1116/1.1313580

Fabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner

J. R. Wendt
, T. W. Krygowski
, G. A. Vawter
, O. Blum
, W. C. Sweatt
, M. E. Warren
, D. Reyes

Research output: Contribution to journal › Conference article › peer-review

5 Scopus citations

Abstract

A multilevel diffractive optical element (DOE) was microfabricated onto a microelectromechanical system (MEMS) in an integrated compact optical MEMS laser scanner. Electron beam lithography was used to pattern and reactive-ion-beam etching was used to etch the microlens. This experiment was believed to be a significant step to achieve a wide range of integrated microsystems.

Original language	English (US)
Pages (from-to)	3608-3611
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	18
Issue number	6
DOIs	https://doi.org/10.1116/1.1313580
State	Published - Nov 2000
Externally published	Yes
Event	44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - Rancho Mirage, CA, USA Duration: May 30 2000 → Jun 2 2000

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1313580

Cite this

Fabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner. / Wendt, J. R.; Krygowski, T. W.; Vawter, G. A. et al.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 18, No. 6, 11.2000, p. 3608-3611.

Research output: Contribution to journal › Conference article › peer-review

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abstract = "A multilevel diffractive optical element (DOE) was microfabricated onto a microelectromechanical system (MEMS) in an integrated compact optical MEMS laser scanner. Electron beam lithography was used to pattern and reactive-ion-beam etching was used to etch the microlens. This experiment was believed to be a significant step to achieve a wide range of integrated microsystems.",

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AU - Vawter, G. A.

AU - Blum, O.

AU - Sweatt, W. C.

AU - Warren, M. E.

AU - Reyes, D.

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AB - A multilevel diffractive optical element (DOE) was microfabricated onto a microelectromechanical system (MEMS) in an integrated compact optical MEMS laser scanner. Electron beam lithography was used to pattern and reactive-ion-beam etching was used to etch the microlens. This experiment was believed to be a significant step to achieve a wide range of integrated microsystems.

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Fabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner

Abstract

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