@inproceedings{e9bff1bcd54e414ab1b29a47c3f7dd18,
title = "Fabrication of circular gratings by FIB damage on GaAs",
abstract = "The authors demonstrate a simple technique for the fabrication of circular gratings using direct focused ion beams and selective etching. This technique allows one to fabricate high quality circular gratings and also to control the tooth height and pitch.",
author = "M. Fallahi and Templeton, {I. M.} and R. Normandin",
year = "1991",
language = "English (US)",
isbn = "0854984100",
series = "Institute of Physics Conference Series",
publisher = "Publ by IOP Publishing Ltd",
pages = "505--509",
booktitle = "Institute of Physics Conference Series",
note = "Proceedings of the 18th International Symposium on Gallium Arsenide and Related Compounds ; Conference date: 09-09-1991 Through 12-09-1991",
}