@inproceedings{9f33640620c645df89c40a4c30023aef,
title = "Fabrication and testing of large flats",
abstract = "Flat mirrors of around 1 meter are efficiently manufactured with large piano polishers and measured with Fizeau interferometry. We have developed technologies and hardware that allow fabrication and testing of flat mirrors that are much larger. The grinding and polishing of the large surfaces uses conventional laps driven under computer control for accurate and systematic control of the surface figure. The measurements are provided by a combination of a scanning pentaprism test, capable of measuring power and low order irregularity over diameters up to 8 meters, and subaperture Fizeau interferometry. We have developed a vibration insensitive Fizeau interferometer with 1 meter aperture and software to optimally combine the data from the subaperture tests. These methods were proven on a 1.6 m flat mirror that was finished to 6 nm rms irregularity and 11 nm rms power.",
keywords = "Large flat fabrication, Metrology, Optical manufacturing",
author = "Julius Yellowhair and Peng Su and Matt Novak and Jim Burge",
year = "2007",
doi = "10.1117/12.736775",
language = "English (US)",
isbn = "9780819468192",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optical Manufacturing and Testing VII",
note = "Optical Manufacturing and Testing VII ; Conference date: 28-08-2007 Through 29-08-2007",
}