Fabrication and testing of a large area, high density, parylene MEMS μECoG array

P. Ledochowitsch, R. J. Félus, R. R. Gibboni, A. Miyakawa, S. Bao, M. M. Maharbiz

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

44 Scopus citations

Fingerprint

Dive into the research topics of 'Fabrication and testing of a large area, high density, parylene MEMS μECoG array'. Together they form a unique fingerprint.

Material Science

Keyphrases

Engineering