Fabrication and characterization of sub-100 μm diameter gallium phosphide solid immersion lens arrays

Matthew Lang; Tom D. Milster; Takahisa Minamitani; Gregg Borek; David Brown

doi:10.1143/JJAP.44.3385

Fabrication and characterization of sub-100 μm diameter gallium phosphide solid immersion lens arrays

Matthew Lang
, Tom D. Milster
, Takahisa Minamitani
, Gregg Borek
, David Brown

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Fabrication and testing of a sub-100 μm gallium phosphide solid immersion lens is described with suitable sphericity (<160nm deviation) to a marginal ray angle of 42° for NA up to 2.2 inside the material.

Original language	English (US)
Pages (from-to)	3385-3387
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	44
Issue number	5 B
DOIs	https://doi.org/10.1143/JJAP.44.3385
State	Published - May 2005

Keywords

Gallium phosphide
Lithography
Phase-shifting interferometry
Solid immersion lens

ASJC Scopus subject areas

General Engineering
General Physics and Astronomy

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10.1143/JJAP.44.3385

Cite this

Fabrication and characterization of sub-100 μm diameter gallium phosphide solid immersion lens arrays. / Lang, Matthew; Milster, Tom D.; Minamitani, Takahisa et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 44, No. 5 B, 05.2005, p. 3385-3387.

Research output: Contribution to journal › Article › peer-review

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abstract = "Fabrication and testing of a sub-100 μm gallium phosphide solid immersion lens is described with suitable sphericity (<160nm deviation) to a marginal ray angle of 42° for NA up to 2.2 inside the material.",

keywords = "Gallium phosphide, Lithography, Phase-shifting interferometry, Solid immersion lens",

author = "Matthew Lang and Milster, \{Tom D.\} and Takahisa Minamitani and Gregg Borek and David Brown",

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AU - Milster, Tom D.

AU - Minamitani, Takahisa

AU - Borek, Gregg

AU - Brown, David

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KW - Lithography

KW - Phase-shifting interferometry

KW - Solid immersion lens

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Fabrication and characterization of sub-100 μm diameter gallium phosphide solid immersion lens arrays

Abstract

Keywords

ASJC Scopus subject areas

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