Abstract
This paper presents simple fabrication of optical waveguides using a novel photosensitive polyimide (PSPI). PSPI has a glass transition temperature (Tg) of 330 °C and is directly patterned by ultraviolet (UV) exposure and wet-chemical development, lending itself to low-cost fabrication techniques. The fabricated waveguides possess low optical absorption at 1.3 and 1.5 μm. Single and multimode buried ridge waveguides were made and tested, and a 0.4-dB/cm optical propagation loss is measured at 1.55 μm.
Original language | English (US) |
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Pages (from-to) | 1291-1294 |
Number of pages | 4 |
Journal | Journal of Lightwave Technology |
Volume | 23 |
Issue number | 3 |
DOIs | |
State | Published - Mar 2005 |
Keywords
- Optical communications
- Optical losses
- Photosensitive materials
- Polyimide
- Polymer waveguides
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics