Abstract
A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of the heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40 μm×1.4 μm×4000 μm. Polysilicon thermistors, 4 μm×4 μm×0.4 μm in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated and the micro-system was characterized. The integrated micro-system performance was theoretically analyzed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 422-428 |
| Number of pages | 7 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 9 |
| Issue number | 4 |
| DOIs | |
| State | Published - Dec 1999 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering