Fabrication and characterization of a microsystem for a micro-scale heat transfer study

Linan Jiang; Yuelin Wang; Man Wong; Yitshak Zohar

doi:10.1088/0960-1317/9/4/320

Fabrication and characterization of a microsystem for a micro-scale heat transfer study

Linan Jiang, Yuelin Wang, Man Wong, Yitshak Zohar

Research output: Contribution to journal › Article › peer-review

34 Scopus citations

Abstract

A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of the heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40 μm×1.4 μm×4000 μm. Polysilicon thermistors, 4 μm×4 μm×0.4 μm in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated and the micro-system was characterized. The integrated micro-system performance was theoretically analyzed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed.

Original language	English (US)
Pages (from-to)	422-428
Number of pages	7
Journal	Journal of Micromechanics and Microengineering
Volume	9
Issue number	4
DOIs	https://doi.org/10.1088/0960-1317/9/4/320
State	Published - Dec 1999
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/9/4/320

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abstract = "A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of the heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40 μm×1.4 μm×4000 μm. Polysilicon thermistors, 4 μm×4 μm×0.4 μm in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated and the micro-system was characterized. The integrated micro-system performance was theoretically analyzed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed.",

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AU - Jiang, Linan

AU - Wang, Yuelin

AU - Wong, Man

AU - Zohar, Yitshak

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AB - A micro-system consisting of micro-channels with integrated temperature sensors was successfully designed and fabricated for the study of the heat-transfer properties of fluid flow in micro-domains. Surface micro-machining technology was used to construct the micro-channels with dimensions of about 40 μm×1.4 μm×4000 μm. Polysilicon thermistors, 4 μm×4 μm×0.4 μm in size were suspended across the channels and directly exposed to the fluid for local temperature measurements. The micro-channels and the micro-sensors were calibrated and the micro-system was characterized. The integrated micro-system performance was theoretically analyzed to provide a framework for the interpretation of the experimental data, and the various heat-transfer mechanisms are subsequently discussed.

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Fabrication and characterization of a microsystem for a micro-scale heat transfer study

Abstract

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