@inproceedings{394cd2754ed240a38a87e4381d35a920,
title = "Experimental investigation of photomask with near-field polarization imaging",
abstract = "Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution for both native and induced polarization (cross polarized) images. A new technique is used to obtain height information from the near-field induced polarization image. An AltPSM mask sample is studied with this imaging technique, and compared to imaging with an AFM and a PSI interferometer. Topological data from the near-field induced polarization image are within a few nanometer of the AFM result, without contacting surface. In addition, features due to undercutting the Cr are observable in the induced polarization image.",
keywords = "AltPSM, High resolution, Near-field, Polarization, Solid immersion lens (SIL), Topographical image",
author = "Tao Chen and Milster, {Tom D.} and Yang, {Seung Hune}",
year = "2006",
doi = "10.1117/12.686420",
language = "English (US)",
isbn = "0819464449",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Photomask Technology 2006",
note = "26th Annual BACUS Symposium on Photomask Technology 2006 ; Conference date: 19-09-2006 Through 22-09-2006",
}