Mathematics
Experimental Investigation
100%
Cleaning
96%
Cavitation
95%
Acoustics
73%
Photomask
67%
Extreme Ultraviolet
47%
Simulation
43%
Wafer
35%
Damage
27%
Extreme Ultraviolet Lithography
24%
Molecular Dynamics Simulation
17%
Silicon
16%
Molecular Dynamics
15%
Thin Films
14%
Shrinking
12%
Defects
11%
Gas
10%
Experiment
8%
Modeling
7%
Physics & Astronomy
cleaning
68%
cavitation flow
66%
photomasks
44%
acoustics
39%
simulation
26%
wafers
17%
molecular dynamics
16%
damage
16%
dissolved gases
15%
radiant flux density
10%
lithography
9%
causes
7%
defects
6%
silicon
6%
thin films
5%
Engineering & Materials Science
Cavitation
75%
Cleaning
64%
Acoustics
56%
Photomasks
49%
Molecular dynamics
25%
Extreme ultraviolet lithography
17%
Silicon wafers
13%
Thin films
10%
Defects
7%
Gases
6%
Computer simulation
6%
Experiments
4%
Chemical Compounds
Cavitation
86%
Simulation
43%
Molecular Dynamics
20%
Gas
7%
Amount
5%