Evanescent imaging with induced polarization by using a solid immersion lens

Tao Chen; Tom D. Milster; Seung Hune Yang; Delbert Hansen

doi:10.1364/OL.32.000124

Evanescent imaging with induced polarization by using a solid immersion lens

Tao Chen, Tom D. Milster, Seung Hune Yang, Delbert Hansen

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10 Scopus citations

Abstract

Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of ±2 nm is demonstrated with a known sample.

Original language	English (US)
Pages (from-to)	124-126
Number of pages	3
Journal	Optics letters
Volume	32
Issue number	2
DOIs	https://doi.org/10.1364/OL.32.000124
State	Published - Jan 15 2007

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1364/OL.32.000124

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@article{f7a8e52cde76431db67ba55cf74871e2,

title = "Evanescent imaging with induced polarization by using a solid immersion lens",

abstract = "Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of ±2 nm is demonstrated with a known sample.",

author = "Tao Chen and Milster, \{Tom D.\} and Yang, \{Seung Hune\} and Delbert Hansen",

year = "2007",

month = jan,

day = "15",

doi = "10.1364/OL.32.000124",

language = "English (US)",

volume = "32",

pages = "124--126",

journal = "Optics letters",

issn = "0146-9592",

publisher = "Optica Publishing Group (formerly OSA)",

number = "2",

}

TY - JOUR

T1 - Evanescent imaging with induced polarization by using a solid immersion lens

AU - Chen, Tao

AU - Milster, Tom D.

AU - Yang, Seung Hune

AU - Hansen, Delbert

PY - 2007/1/15

Y1 - 2007/1/15

N2 - Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of ±2 nm is demonstrated with a known sample.

AB - Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of ±2 nm is demonstrated with a known sample.

UR - https://www.scopus.com/pages/publications/33846859945

UR - https://www.scopus.com/inward/citedby.url?scp=33846859945&partnerID=8YFLogxK

U2 - 10.1364/OL.32.000124

DO - 10.1364/OL.32.000124

M3 - Article

C2 - 17186038

AN - SCOPUS:33846859945

SN - 0146-9592

VL - 32

SP - 124

EP - 126

JO - Optics letters

JF - Optics letters

IS - 2

ER -

Evanescent imaging with induced polarization by using a solid immersion lens

Abstract

ASJC Scopus subject areas

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