Abstract
Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of ±2 nm is demonstrated with a known sample.
Original language | English (US) |
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Pages (from-to) | 124-126 |
Number of pages | 3 |
Journal | Optics letters |
Volume | 32 |
Issue number | 2 |
DOIs | |
State | Published - Jan 15 2007 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics