Evaluation of a backside-illuminated ISIS

H. D. Nguyen; C. Vo-Le; V. T.S. Dao; K. Takehara; T. G. Etoh; Y. Kondo; H. Maruno; H. Tominaga; H. Soya; H. Van Kuijk; J. Bosiers; W. Klaassens; G. Ingram; S. Singh; M. Lesser

doi:10.1117/12.821985

Evaluation of a backside-illuminated ISIS

H. D. Nguyen, C. Vo-Le, V. T.S. Dao, K. Takehara, T. G. Etoh, Y. Kondo, H. Maruno, H. Tominaga, H. Soya, H. Van Kuijk, J. Bosiers, W. Klaassens, G. Ingram, S. Singh, M. Lesser

Research output: Contribution to journal › Conference article › peer-review

Abstract

This paper presents preliminary evaluation results of a test sensor of the backside-illuminated ISIS, an ultra-high sensitivity and ultra-high speed CCD image sensor. To achieve ultra-high sensitivity, the CCD image sensor employs the following three technologies: backside illumination, cooling and Charge Carrier Multiplication (CCM). The test sensor has been designed, fabricated and evaluated. At room temperature without cooling, the video camera has about ten-time higher sensitivity than the previous one, which was supported by a conventional front side illumination technology. Furthermore, the video camera can detect images at very low signal level, less than 5 e-, by using CCM at -40 degree C.

Original language	English (US)
Article number	712607
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7126
DOIs	https://doi.org/10.1117/12.821985
State	Published - 2009
Event	28th International Congress on High-Speed Imaging and Photonics - Canberra, Australia Duration: Nov 9 2008 → Nov 14 2008

Keywords

Backside illumination
CCM
High-sensitivity
High-speed
ISIS
Video camera

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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Nguyen, H. D., Vo-Le, C., Dao, V. T. S., Takehara, K., Etoh, T. G., Kondo, Y., Maruno, H., Tominaga, H., Soya, H., Van Kuijk, H., Bosiers, J., Klaassens, W., Ingram, G., Singh, S., & Lesser, M. (2009). Evaluation of a backside-illuminated ISIS. Proceedings of SPIE - The International Society for Optical Engineering, 7126, Article 712607. https://doi.org/10.1117/12.821985

@article{6fe20e83ce544bfabec719e8cbc3aa48,

title = "Evaluation of a backside-illuminated ISIS",

abstract = "This paper presents preliminary evaluation results of a test sensor of the backside-illuminated ISIS, an ultra-high sensitivity and ultra-high speed CCD image sensor. To achieve ultra-high sensitivity, the CCD image sensor employs the following three technologies: backside illumination, cooling and Charge Carrier Multiplication (CCM). The test sensor has been designed, fabricated and evaluated. At room temperature without cooling, the video camera has about ten-time higher sensitivity than the previous one, which was supported by a conventional front side illumination technology. Furthermore, the video camera can detect images at very low signal level, less than 5 e-, by using CCM at -40 degree C.",

keywords = "Backside illumination, CCM, High-sensitivity, High-speed, ISIS, Video camera",

author = "Nguyen, {H. D.} and C. Vo-Le and Dao, {V. T.S.} and K. Takehara and Etoh, {T. G.} and Y. Kondo and H. Maruno and H. Tominaga and H. Soya and {Van Kuijk}, H. and J. Bosiers and W. Klaassens and G. Ingram and S. Singh and M. Lesser",

year = "2009",

doi = "10.1117/12.821985",

language = "English (US)",

volume = "7126",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

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note = "28th International Congress on High-Speed Imaging and Photonics ; Conference date: 09-11-2008 Through 14-11-2008",

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T1 - Evaluation of a backside-illuminated ISIS

AU - Nguyen, H. D.

AU - Vo-Le, C.

AU - Dao, V. T.S.

AU - Takehara, K.

AU - Etoh, T. G.

AU - Kondo, Y.

AU - Maruno, H.

AU - Tominaga, H.

AU - Soya, H.

AU - Van Kuijk, H.

AU - Bosiers, J.

AU - Klaassens, W.

AU - Ingram, G.

AU - Singh, S.

AU - Lesser, M.

PY - 2009

Y1 - 2009

N2 - This paper presents preliminary evaluation results of a test sensor of the backside-illuminated ISIS, an ultra-high sensitivity and ultra-high speed CCD image sensor. To achieve ultra-high sensitivity, the CCD image sensor employs the following three technologies: backside illumination, cooling and Charge Carrier Multiplication (CCM). The test sensor has been designed, fabricated and evaluated. At room temperature without cooling, the video camera has about ten-time higher sensitivity than the previous one, which was supported by a conventional front side illumination technology. Furthermore, the video camera can detect images at very low signal level, less than 5 e-, by using CCM at -40 degree C.

AB - This paper presents preliminary evaluation results of a test sensor of the backside-illuminated ISIS, an ultra-high sensitivity and ultra-high speed CCD image sensor. To achieve ultra-high sensitivity, the CCD image sensor employs the following three technologies: backside illumination, cooling and Charge Carrier Multiplication (CCM). The test sensor has been designed, fabricated and evaluated. At room temperature without cooling, the video camera has about ten-time higher sensitivity than the previous one, which was supported by a conventional front side illumination technology. Furthermore, the video camera can detect images at very low signal level, less than 5 e-, by using CCM at -40 degree C.

KW - Backside illumination

KW - CCM

KW - High-sensitivity

KW - High-speed

KW - ISIS

KW - Video camera

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U2 - 10.1117/12.821985

DO - 10.1117/12.821985

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VL - 7126

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 712607

T2 - 28th International Congress on High-Speed Imaging and Photonics

Y2 - 9 November 2008 through 14 November 2008

ER -

Evaluation of a backside-illuminated ISIS

Abstract

Keywords

ASJC Scopus subject areas

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