Abstract
Study data show that an advanced coulometric hygrometer design incorporating a counterflow sensor cell, a moisture addition feature, and signal integration extends the range of the measurements technique to single-digit ppd levels. Characterization of the hygrometer in the integration mode in parallel with an atmospheric pressure ionization mass spectrometer (APIMS) indicated that its accuracy is ±4 ppb, its detection limit is 1 ppd at a 95% confidence limit, and its response time to a 5-ppb moisture intrusion is 50% in 15 minutes.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 43-49 |
| Number of pages | 7 |
| Journal | MICRO |
| Volume | 13 |
| Issue number | 4 |
| State | Published - Apr 1995 |
ASJC Scopus subject areas
- General Engineering