Fingerprint
Dive into the research topics of 'Estimating the effective pressure on patterned wafers during STI CMP'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Estimating the effective pressure on patterned wafers during STI CMP
- J. Sorooshian
- , L. Borucki
- , R. Timon
- , D. Stein
- , D. Boning
- , D. Hetherington
- , A. Philipossian
Research output: Contribution to journal › Article › peer-review
6
Scopus
citations