Fingerprint
Dive into the research topics of 'Estimating the effective pressure on patterned wafers during STI CMP'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Estimating the effective pressure on patterned wafers during STI CMP
J. Sorooshian, L. Borucki, R. Timon, D. Stein, D. Boning, D. Hetherington, A. Philipossian
Research output: Contribution to journal › Article › peer-review
6
Scopus
citations