Er-doped amorphous and crystalline Al2O3 and La2O3 films grown with low energy ions from an ECR plasma

J. C. Barbour; B. G. Potter; D. M. Follstaedt; J. A. Knapp; M. B. Sinclair

doi:10.1557/proc-438-465

Er-doped amorphous and crystalline Al₂O₃ and La₂O₃ films grown with low energy ions from an ECR plasma

J. C. Barbour, B. G. Potter, D. M. Follstaedt, J. A. Knapp, M. B. Sinclair

Research output: Contribution to journal › Conference article › peer-review

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Abstract

The effects of low energy ions from a biased electron cyclotron resonance plasma during growth of Al₂O₃ and La₂O₃ are used to modify the density and crystalline quality of these oxide films. The type of phase formed for Al₂O₃ is varied with the ion-assisted growth from amorphous to crystalline γ-Al₂O₃. The photoluminescence (PL) properties of different Er-doped Al- and La-oxide phases are examined, and through comparison of the PL spectra, the local environment of Er in these oxide materials is discussed.

Original language	English (US)
Pages (from-to)	465-470
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	438
DOIs	https://doi.org/10.1557/proc-438-465
State	Published - 1996
Externally published	Yes
Event	Proceedings of the 1996 MRS Fall Meeting - Boston, MA, USA Duration: Dec 4 1996 → Dec 5 1996

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Er-doped amorphous and crystalline Al2O3 and La2O3 films grown with low energy ions from an ECR plasma",

abstract = "The effects of low energy ions from a biased electron cyclotron resonance plasma during growth of Al2O3 and La2O3 are used to modify the density and crystalline quality of these oxide films. The type of phase formed for Al2O3 is varied with the ion-assisted growth from amorphous to crystalline γ-Al2O3. The photoluminescence (PL) properties of different Er-doped Al- and La-oxide phases are examined, and through comparison of the PL spectra, the local environment of Er in these oxide materials is discussed.",

author = "Barbour, {J. C.} and Potter, {B. G.} and Follstaedt, {D. M.} and Knapp, {J. A.} and Sinclair, {M. B.}",

year = "1996",

doi = "10.1557/proc-438-465",

language = "English (US)",

volume = "438",

pages = "465--470",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1996 MRS Fall Meeting ; Conference date: 04-12-1996 Through 05-12-1996",

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TY - JOUR

T1 - Er-doped amorphous and crystalline Al2O3 and La2O3 films grown with low energy ions from an ECR plasma

AU - Barbour, J. C.

AU - Potter, B. G.

AU - Follstaedt, D. M.

AU - Knapp, J. A.

AU - Sinclair, M. B.

PY - 1996

Y1 - 1996

N2 - The effects of low energy ions from a biased electron cyclotron resonance plasma during growth of Al2O3 and La2O3 are used to modify the density and crystalline quality of these oxide films. The type of phase formed for Al2O3 is varied with the ion-assisted growth from amorphous to crystalline γ-Al2O3. The photoluminescence (PL) properties of different Er-doped Al- and La-oxide phases are examined, and through comparison of the PL spectra, the local environment of Er in these oxide materials is discussed.

AB - The effects of low energy ions from a biased electron cyclotron resonance plasma during growth of Al2O3 and La2O3 are used to modify the density and crystalline quality of these oxide films. The type of phase formed for Al2O3 is varied with the ion-assisted growth from amorphous to crystalline γ-Al2O3. The photoluminescence (PL) properties of different Er-doped Al- and La-oxide phases are examined, and through comparison of the PL spectra, the local environment of Er in these oxide materials is discussed.

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U2 - 10.1557/proc-438-465

DO - 10.1557/proc-438-465

M3 - Conference article

AN - SCOPUS:0030364063

SN - 0272-9172

VL - 438

SP - 465

EP - 470

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1996 MRS Fall Meeting

Y2 - 4 December 1996 through 5 December 1996

ER -

Er-doped amorphous and crystalline Al₂O₃ and La₂O₃ films grown with low energy ions from an ECR plasma

Abstract

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