Environmental challenges in nanoelectronics manufacturing

Farhang Shadman

doi:10.1016/j.coche.2012.03.004

Environmental challenges in nanoelectronics manufacturing

Farhang Shadman

Research output: Contribution to journal › Review article › peer-review

7 Scopus citations

Abstract

Manufacturing in nanoscale is not a simple extrapolation of the current and conventional manufacturing practices. The shift to nanoscale creates both major issues as well as significant opportunities in performance, cost, and environmental impact for the electronics industry. This article focuses on both the positive and the negative environmental impacts of this inevitable paradigm change. The inter-relationship between the three sustainability factors (performance, cost, and environmental impact) for future electronics manufacturing will be analyzed. In particular, the challenges related to resource requirements and utilization (water, energy, and chemicals) are discussed. Examples of unique opportunities for environmental gain that nanoscale manufacturing can provide are presented.

Original language	English (US)
Pages (from-to)	258-268
Number of pages	11
Journal	Current Opinion in Chemical Engineering
Volume	1
Issue number	3
DOIs	https://doi.org/10.1016/j.coche.2012.03.004
State	Published - Aug 2012

ASJC Scopus subject areas

General Energy

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10.1016/j.coche.2012.03.004

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abstract = "Manufacturing in nanoscale is not a simple extrapolation of the current and conventional manufacturing practices. The shift to nanoscale creates both major issues as well as significant opportunities in performance, cost, and environmental impact for the electronics industry. This article focuses on both the positive and the negative environmental impacts of this inevitable paradigm change. The inter-relationship between the three sustainability factors (performance, cost, and environmental impact) for future electronics manufacturing will be analyzed. In particular, the challenges related to resource requirements and utilization (water, energy, and chemicals) are discussed. Examples of unique opportunities for environmental gain that nanoscale manufacturing can provide are presented.",

author = "Farhang Shadman",

note = "Funding Information: Financial support provided by the Semiconductor Research Corporation (SRC) and other industrial members of the Engineering Research Center for Environmentally Benign Semiconductor Manufacturing is acknowledged. ",

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PY - 2012/8

Y1 - 2012/8

N2 - Manufacturing in nanoscale is not a simple extrapolation of the current and conventional manufacturing practices. The shift to nanoscale creates both major issues as well as significant opportunities in performance, cost, and environmental impact for the electronics industry. This article focuses on both the positive and the negative environmental impacts of this inevitable paradigm change. The inter-relationship between the three sustainability factors (performance, cost, and environmental impact) for future electronics manufacturing will be analyzed. In particular, the challenges related to resource requirements and utilization (water, energy, and chemicals) are discussed. Examples of unique opportunities for environmental gain that nanoscale manufacturing can provide are presented.

AB - Manufacturing in nanoscale is not a simple extrapolation of the current and conventional manufacturing practices. The shift to nanoscale creates both major issues as well as significant opportunities in performance, cost, and environmental impact for the electronics industry. This article focuses on both the positive and the negative environmental impacts of this inevitable paradigm change. The inter-relationship between the three sustainability factors (performance, cost, and environmental impact) for future electronics manufacturing will be analyzed. In particular, the challenges related to resource requirements and utilization (water, energy, and chemicals) are discussed. Examples of unique opportunities for environmental gain that nanoscale manufacturing can provide are presented.

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ER -

Environmental challenges in nanoelectronics manufacturing

Abstract

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