TY - JOUR
T1 - Environmental challenges in nanoelectronics manufacturing
AU - Shadman, Farhang
N1 - Funding Information:
Financial support provided by the Semiconductor Research Corporation (SRC) and other industrial members of the Engineering Research Center for Environmentally Benign Semiconductor Manufacturing is acknowledged.
PY - 2012/8
Y1 - 2012/8
N2 - Manufacturing in nanoscale is not a simple extrapolation of the current and conventional manufacturing practices. The shift to nanoscale creates both major issues as well as significant opportunities in performance, cost, and environmental impact for the electronics industry. This article focuses on both the positive and the negative environmental impacts of this inevitable paradigm change. The inter-relationship between the three sustainability factors (performance, cost, and environmental impact) for future electronics manufacturing will be analyzed. In particular, the challenges related to resource requirements and utilization (water, energy, and chemicals) are discussed. Examples of unique opportunities for environmental gain that nanoscale manufacturing can provide are presented.
AB - Manufacturing in nanoscale is not a simple extrapolation of the current and conventional manufacturing practices. The shift to nanoscale creates both major issues as well as significant opportunities in performance, cost, and environmental impact for the electronics industry. This article focuses on both the positive and the negative environmental impacts of this inevitable paradigm change. The inter-relationship between the three sustainability factors (performance, cost, and environmental impact) for future electronics manufacturing will be analyzed. In particular, the challenges related to resource requirements and utilization (water, energy, and chemicals) are discussed. Examples of unique opportunities for environmental gain that nanoscale manufacturing can provide are presented.
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U2 - 10.1016/j.coche.2012.03.004
DO - 10.1016/j.coche.2012.03.004
M3 - Review article
AN - SCOPUS:84867269829
SN - 2211-3398
VL - 1
SP - 258
EP - 268
JO - Current Opinion in Chemical Engineering
JF - Current Opinion in Chemical Engineering
IS - 3
ER -