Environmental challenges and opportunities in nanoelectronics manufacturing

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Manufacturing in nano-scale is not a simple extrapolation of the current and conventional manufacturing practices. The shift to nano-scale creates both major issues as well as significant opportunities in performance, cost, and environmental impact for the electronics industry. There are both positive and the negative environmental impacts of this inevitable paradigm change. The inter-relationship between the three sustainability factors (performance, cost, and environmental impact) for future electronics manufacturing are analyzed. In particular, the challenges related to resource requirements and utilization (water, energy, and chemicals) are discussed.

Original languageEnglish (US)
Title of host publicationSemiconductor Technology, ISTC 2008 - Proceedings of the 7th International Conference on Semiconductor Technology
Number of pages4
StatePublished - 2008
Event7th International Conference on Semiconductor Technology, ISTC 2008 - Shanghai, China
Duration: Mar 15 2008Mar 17 2008

Publication series

NameProceedings - Electrochemical Society
VolumePV 2008-1


Other7th International Conference on Semiconductor Technology, ISTC 2008


  • Environmental impact
  • Nano-electronics
  • Nano-techno logy
  • Sustainability

ASJC Scopus subject areas

  • Electrochemistry


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