TY - GEN
T1 - Environmental challenges and opportunities in nanoelectronics manufacturing
AU - Shadman, Farhang
PY - 2008
Y1 - 2008
N2 - Manufacturing in nano-scale is not a simple extrapolation of the current and conventional manufacturing practices. The shift to nano-scale creates both major issues as well as significant opportunities in performance, cost, and environmental impact for the electronics industry. There are both positive and the negative environmental impacts of this inevitable paradigm change. The inter-relationship between the three sustainability factors (performance, cost, and environmental impact) for future electronics manufacturing are analyzed. In particular, the challenges related to resource requirements and utilization (water, energy, and chemicals) are discussed.
AB - Manufacturing in nano-scale is not a simple extrapolation of the current and conventional manufacturing practices. The shift to nano-scale creates both major issues as well as significant opportunities in performance, cost, and environmental impact for the electronics industry. There are both positive and the negative environmental impacts of this inevitable paradigm change. The inter-relationship between the three sustainability factors (performance, cost, and environmental impact) for future electronics manufacturing are analyzed. In particular, the challenges related to resource requirements and utilization (water, energy, and chemicals) are discussed.
KW - Environmental impact
KW - Nano-electronics
KW - Nano-techno logy
KW - Sustainability
UR - http://www.scopus.com/inward/record.url?scp=52349121436&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=52349121436&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:52349121436
SN - 9789881740816
T3 - Proceedings - Electrochemical Society
SP - 641
EP - 644
BT - Semiconductor Technology, ISTC 2008 - Proceedings of the 7th International Conference on Semiconductor Technology
T2 - 7th International Conference on Semiconductor Technology, ISTC 2008
Y2 - 15 March 2008 through 17 March 2008
ER -