Enhancement of the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates fabricated by atomic layer deposition

L. Karvonen; A. Säynätjoki; Y. Chen; H. Jussila; J. Rönn; M. Ruoho; T. Alasaarela; S. Kujala; R. A. Norwood; N. Peyghambarian; K. Kieu; S. Honkanen

doi:10.1063/1.4813557

Enhancement of the third-order optical nonlinearity in ZnO/Al ₂O₃ nanolaminates fabricated by atomic layer deposition

L. Karvonen
, A. Säynätjoki
, Y. Chen
, H. Jussila
, J. Rönn
, M. Ruoho
, T. Alasaarela
, S. Kujala
, R. A. Norwood
, N. Peyghambarian
, K. Kieu
, S. Honkanen

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

We investigate the third-order optical nonlinearity in ZnO/Al ₂O₃ nanolaminates fabricated by atomic layer deposition and show that the third-order optical nonlinearity can be enhanced by nanoscale engineering of the thin film structure. The grain size of the polycrystalline ZnO film is controlled by varying the thickness of the ZnO layers in the nanolaminate in which thin (∼2 nm) amorphous Al₂O₃ layers work as stopping layers for ZnO crystal growth. Nanoscale engineering enables us to achieve a third harmonic generated signal enhancement of ∼13 times from the optimized nanolaminate structure compared to a ZnO reference film of comparable thickness.

Original language	English (US)
Article number	031903
Journal	Applied Physics Letters
Volume	103
Issue number	3
DOIs	https://doi.org/10.1063/1.4813557
State	Published - Jul 15 2013

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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Karvonen, L., Säynätjoki, A., Chen, Y., Jussila, H., Rönn, J., Ruoho, M., Alasaarela, T., Kujala, S., Norwood, R. A., Peyghambarian, N., Kieu, K., & Honkanen, S. (2013). Enhancement of the third-order optical nonlinearity in ZnO/Al ₂O₃ nanolaminates fabricated by atomic layer deposition. Applied Physics Letters, 103(3), Article 031903. https://doi.org/10.1063/1.4813557

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title = "Enhancement of the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates fabricated by atomic layer deposition",

abstract = "We investigate the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates fabricated by atomic layer deposition and show that the third-order optical nonlinearity can be enhanced by nanoscale engineering of the thin film structure. The grain size of the polycrystalline ZnO film is controlled by varying the thickness of the ZnO layers in the nanolaminate in which thin (∼2 nm) amorphous Al2O3 layers work as stopping layers for ZnO crystal growth. Nanoscale engineering enables us to achieve a third harmonic generated signal enhancement of ∼13 times from the optimized nanolaminate structure compared to a ZnO reference film of comparable thickness.",

author = "L. Karvonen and A. S{\"a}yn{\"a}tjoki and Y. Chen and H. Jussila and J. R{\"o}nn and M. Ruoho and T. Alasaarela and S. Kujala and Norwood, \{R. A.\} and N. Peyghambarian and K. Kieu and S. Honkanen",

note = "Funding Information: We acknowledge R. Ali from University of Eastern Finland for the ellipsometric characterization of the samples. The work was partially financed by the Finnish Academy Grant Nos. 134087 (A.S.) and 251210, the Graduate School of Modern Optics and Photonics (L.K. and H.J.), Walter Ahlstr{\"o}m foundation (L.K.) and the Finnish Foundation for Technology Promotion (L.K. and A.S.) We also acknowledge the provision of technical facilities of the Micronova, Nanofabrication Centre of Aalto University. University of Arizona contributors would like to acknowledge the support of the AFOSR COMAS MURI (FA9550-10-1-0558), the CIAN NSF ERC under Grant No. \#EEC-0812072, and TRIF Photonics funding from the State of Arizona.",

year = "2013",

month = jul,

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doi = "10.1063/1.4813557",

language = "English (US)",

volume = "103",

journal = "Applied Physics Letters",

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T1 - Enhancement of the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates fabricated by atomic layer deposition

AU - Karvonen, L.

AU - Säynätjoki, A.

AU - Chen, Y.

AU - Jussila, H.

AU - Rönn, J.

AU - Ruoho, M.

AU - Alasaarela, T.

AU - Kujala, S.

AU - Norwood, R. A.

AU - Peyghambarian, N.

AU - Kieu, K.

AU - Honkanen, S.

N1 - Funding Information: We acknowledge R. Ali from University of Eastern Finland for the ellipsometric characterization of the samples. The work was partially financed by the Finnish Academy Grant Nos. 134087 (A.S.) and 251210, the Graduate School of Modern Optics and Photonics (L.K. and H.J.), Walter Ahlström foundation (L.K.) and the Finnish Foundation for Technology Promotion (L.K. and A.S.) We also acknowledge the provision of technical facilities of the Micronova, Nanofabrication Centre of Aalto University. University of Arizona contributors would like to acknowledge the support of the AFOSR COMAS MURI (FA9550-10-1-0558), the CIAN NSF ERC under Grant No. #EEC-0812072, and TRIF Photonics funding from the State of Arizona.

PY - 2013/7/15

Y1 - 2013/7/15

N2 - We investigate the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates fabricated by atomic layer deposition and show that the third-order optical nonlinearity can be enhanced by nanoscale engineering of the thin film structure. The grain size of the polycrystalline ZnO film is controlled by varying the thickness of the ZnO layers in the nanolaminate in which thin (∼2 nm) amorphous Al2O3 layers work as stopping layers for ZnO crystal growth. Nanoscale engineering enables us to achieve a third harmonic generated signal enhancement of ∼13 times from the optimized nanolaminate structure compared to a ZnO reference film of comparable thickness.

AB - We investigate the third-order optical nonlinearity in ZnO/Al 2O3 nanolaminates fabricated by atomic layer deposition and show that the third-order optical nonlinearity can be enhanced by nanoscale engineering of the thin film structure. The grain size of the polycrystalline ZnO film is controlled by varying the thickness of the ZnO layers in the nanolaminate in which thin (∼2 nm) amorphous Al2O3 layers work as stopping layers for ZnO crystal growth. Nanoscale engineering enables us to achieve a third harmonic generated signal enhancement of ∼13 times from the optimized nanolaminate structure compared to a ZnO reference film of comparable thickness.

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Enhancement of the third-order optical nonlinearity in ZnO/Al ₂O₃ nanolaminates fabricated by atomic layer deposition

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