@inproceedings{9bc1163f75114edfac018808879d8473,
title = "Enhancement of the photoluminescence in Er-doped Al2O3 fabricated by atomic layer deposition",
abstract = "We show the enhancement of the photoluminescence at λ = 1:5 μm in highly-doped (> 1021 cm-3) Er-Al2O3 samples by controlling the vertical distance between the Er-ions using atomic layer deposition (ALD) technique. Er2O3 and Al2O3 were deposited on top of silicon in an alternating fashion with ALD. Five Er2O3-Al2O3 samples were fabricated by keeping the amount of Er2O3 constant but changing the thickness of the Al2O3-layers between the Er2O3-layers. The PL spectra of the samples reveal that the PL signal enhances up to 90% when the vertical distance (the number of Al2O3-layers) between the Er-ions increases. The PL enhancement can be related to the reduction of up-conversion signal at 532 and 650 nm in the Er-ions. Our results demonstrate that ALD is an excellent technique to fabricate and to optimize Er-doped materials due to its unique depositions properties.",
keywords = "Erbium, atomic layer deposition, integrated optics, optical amplifier, photoluminescence",
author = "John R{\"o}nn and Lasse Karvonen and Alexander Pyym{\"a}ki-Perros and Peyghambarian, {Nasser N} and Harri Lipsanen and Antti S{\"a}yn{\"a}tjoki and Zhipei Sun",
note = "Publisher Copyright: {\textcopyright} 2016 SPIE.; Integrated Optics: Devices, Materials, and Technologies XX ; Conference date: 15-02-2016 Through 17-02-2016",
year = "2016",
doi = "10.1117/12.2212990",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Conti, {Gualtiero Nunzi} and Jean-Emmanuel Broquin",
booktitle = "Integrated Optics",
}