Abstract
This paper studies the nucleate boiling conditions and mechanisms in plasma etched silicon microchannels below 150 μm hydraulic diameter. Boiling regimes and the wall superheat in microchannels with various DI water surface tensions and wall surface roughness are discussed. The experiments show that wall superheat in microchannels is primarily due to the lack of active nucleation sites rather than limited channel space or a high liquid surface tension. By creating small cavities in the channel walls, superheat can be eliminated from as small as 28 μm hydraulic diameter silicon channels.
Original language | English (US) |
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Pages | 89-92 |
Number of pages | 4 |
State | Published - 2002 |
Externally published | Yes |
Event | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: Jan 20 2002 → Jan 24 2002 |
Other
Other | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 |
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Country/Territory | United States |
City | Las Vegas, NV |
Period | 1/20/02 → 1/24/02 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering