Energy transfer by plasmon mode during macromolecules ion irradiation

Jean Pierre Mouton; André Mouton; Thierry Trigaud; Jean Luc Bredas; Olivier Lhost

doi:10.1109/IEMBS.1992.5760889

Energy transfer by plasmon mode during macromolecules ion irradiation

Jean Pierre Mouton, André Mouton, Thierry Trigaud, Jean Luc Bredas, Olivier Lhost

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Macromolecules can show two widely different behaviours during ion bombardement, in the 100 keV energy range, so long as the ion fluence remains below a classical value of 10¹⁷ ions/cm². The ones are subject to a such important volume contraction that they can completely disappear. That is the case of cellulose nitrate used in microelectronics as self-developing resist for ion lithography. The second category shows no significant shrinkage; only a small surface sputtering is observed. We find in this case the electroactive polymers.

Original language	English (US)
Title of host publication	Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS 1992
Editors	Jean Pierre Morucci, Jean Louis Coatrieux, Robert Plonsey, Swamy Laxminarayan
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	127-128
Number of pages	2
ISBN (Electronic)	0780307852
DOIs	https://doi.org/10.1109/IEMBS.1992.5760889
State	Published - 1992
Externally published	Yes
Event	14th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS 1992 - Paris, France Duration: Oct 29 1992 → Nov 1 1992

Publication series

Name	Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS
Volume	1
ISSN (Print)	1557-170X

Conference

Conference	14th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS 1992
Country/Territory	France
City	Paris
Period	10/29/92 → 11/1/92

ASJC Scopus subject areas

Signal Processing
Biomedical Engineering
Computer Vision and Pattern Recognition
Health Informatics

Access to Document

10.1109/IEMBS.1992.5760889

Cite this

Mouton, J. P., Mouton, A., Trigaud, T., Bredas, J. L., & Lhost, O. (1992). Energy transfer by plasmon mode during macromolecules ion irradiation. In J. P. Morucci, J. L. Coatrieux, R. Plonsey, & S. Laxminarayan (Eds.), Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS 1992 (pp. 127-128). Article 5760889 (Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IEMBS.1992.5760889

Energy transfer by plasmon mode during macromolecules ion irradiation. / Mouton, Jean Pierre; Mouton, André; Trigaud, Thierry et al.
Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS 1992. ed. / Jean Pierre Morucci; Jean Louis Coatrieux; Robert Plonsey; Swamy Laxminarayan. Institute of Electrical and Electronics Engineers Inc., 1992. p. 127-128 5760889 (Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Mouton, JP, Mouton, A, Trigaud, T, Bredas, JL & Lhost, O 1992, Energy transfer by plasmon mode during macromolecules ion irradiation. in JP Morucci, JL Coatrieux, R Plonsey & S Laxminarayan (eds), Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS 1992., 5760889, Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS, vol. 1, Institute of Electrical and Electronics Engineers Inc., pp. 127-128, 14th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS 1992, Paris, France, 10/29/92. https://doi.org/10.1109/IEMBS.1992.5760889

Mouton JP, Mouton A, Trigaud T, Bredas JL, Lhost O. Energy transfer by plasmon mode during macromolecules ion irradiation. In Morucci JP, Coatrieux JL, Plonsey R, Laxminarayan S, editors, Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS 1992. Institute of Electrical and Electronics Engineers Inc. 1992. p. 127-128. 5760889. (Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS). doi: 10.1109/IEMBS.1992.5760889

Mouton, Jean Pierre ; Mouton, André ; Trigaud, Thierry et al. / Energy transfer by plasmon mode during macromolecules ion irradiation. Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS 1992. editor / Jean Pierre Morucci ; Jean Louis Coatrieux ; Robert Plonsey ; Swamy Laxminarayan. Institute of Electrical and Electronics Engineers Inc., 1992. pp. 127-128 (Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS).

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abstract = "Macromolecules can show two widely different behaviours during ion bombardement, in the 100 keV energy range, so long as the ion fluence remains below a classical value of 1017 ions/cm2. The ones are subject to a such important volume contraction that they can completely disappear. That is the case of cellulose nitrate used in microelectronics as self-developing resist for ion lithography. The second category shows no significant shrinkage; only a small surface sputtering is observed. We find in this case the electroactive polymers.",

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Energy transfer by plasmon mode during macromolecules ion irradiation

Abstract

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