@inproceedings{20efab97392144c8907872ef41771db6,
title = "Enabling high performance instruments for astronomy and space exploration with ALD",
abstract = "Future UV, X-ray, and sub-millimeter telescopes and spectrometers have the potential to revolutionize our understanding of the formation and habitability of the modern universe.(1-4) Star formation, dark energy, and the composition of the intergalactic medium are only some of the key scientific topics that can be addressed by UV astronomy and astrophysics. Sub-millimeter astronomy can probe the fine structure of the cosmic microwave background, giving glimpses into the early universe immediately following the Big Bang.(5) Various surface engineering techniques including molecular beam epitaxy and atomic layer deposition have been utilized here to significantly boost the performance of key components of instruments for astronomy and astrophysics investigation, taking advantage of the atomic level precision that these techniques provide.",
author = "F. Greer and Hoenk, {M. E.} and Jacquot, {B. C.} and Jones, {T. J.} and Dickie, {M. R.} and Monacos, {S. P.} and S. Nikzad and E. Hamden and D. Schmonivich and P. Day and H. Leduc",
year = "2011",
doi = "10.1149/1.3633676",
language = "English (US)",
isbn = "9781566779029",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "2",
pages = "263--268",
booktitle = "Atomic Layer Deposition Applications 7",
edition = "2",
note = "7th Symposium on Atomic Layer Deposition Applications - 220th ECS Meeting ; Conference date: 10-10-2011 Through 12-10-2011",
}