Abstract
A report on the various goals of ellipsometry was presented. Ellipsometry determined the optical and structural constants of thin films and flat surfaces based on the measurements of the ellipse of polarization in reflected or transmitted light. The results of ellipsometric measurements were fed to a computer program that searches the space of unknown parameters.
| Original language | English (US) |
|---|---|
| Pages | 52-56 |
| Number of pages | 5 |
| Volume | 11 |
| No | 4 |
| Specialist publication | Optics and Photonics News |
| DOIs | |
| State | Published - Apr 2000 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering