Electrostatic spline lenses

M. Szilagyi

doi:10.1116/1.574117

Electrostatic spline lenses

M. Szilagyi

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

A systematic investigation of electrostatic lenses is proposed on the basis of the cubic spline model. The model is a convenient tool for varying the basic parameters of the potential distributions of different classes of electrostatic lenses. The actual electrode system is reconstructed from the distribution with the best figure of merit by a straightforward procedure. The simple spline class consisting of two intervals is investigated in detail. A superior quality six-electrode lens is proposed as an example.

Original language	English (US)
Pages (from-to)	273-278
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	5
Issue number	2
DOIs	https://doi.org/10.1116/1.574117
State	Published - Mar 1987
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "A systematic investigation of electrostatic lenses is proposed on the basis of the cubic spline model. The model is a convenient tool for varying the basic parameters of the potential distributions of different classes of electrostatic lenses. The actual electrode system is reconstructed from the distribution with the best figure of merit by a straightforward procedure. The simple spline class consisting of two intervals is investigated in detail. A superior quality six-electrode lens is proposed as an example.",

author = "M. Szilagyi",

year = "1987",

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AB - A systematic investigation of electrostatic lenses is proposed on the basis of the cubic spline model. The model is a convenient tool for varying the basic parameters of the potential distributions of different classes of electrostatic lenses. The actual electrode system is reconstructed from the distribution with the best figure of merit by a straightforward procedure. The simple spline class consisting of two intervals is investigated in detail. A superior quality six-electrode lens is proposed as an example.

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Electrostatic spline lenses

Abstract

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