Electrostatic lenses with very small spherical aberration

M. Szilagyi

doi:10.1063/1.97541

Electrostatic lenses with very small spherical aberration

M. Szilagyi

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

A class of electrostatic lenses with extremely low spherical aberration is proposed. The axial potential distribution of these lenses has an asymmetric bell-shaped form with a lower potential on the image side. A lens with C _so∞/f_o=0.51 is presented as an example. The maximum required electrode voltage is only five times larger than the initial accelerating voltage. At 5 mrad acceptance half-angle, 51 mm focal length, and magnification M=-3.3 the radius of the spherical aberration disk is 6 nm.

Original language	English (US)
Pages (from-to)	767-769
Number of pages	3
Journal	Applied Physics Letters
Volume	49
Issue number	13
DOIs	https://doi.org/10.1063/1.97541
State	Published - 1986
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.97541

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title = "Electrostatic lenses with very small spherical aberration",

abstract = "A class of electrostatic lenses with extremely low spherical aberration is proposed. The axial potential distribution of these lenses has an asymmetric bell-shaped form with a lower potential on the image side. A lens with C so∞/fo=0.51 is presented as an example. The maximum required electrode voltage is only five times larger than the initial accelerating voltage. At 5 mrad acceptance half-angle, 51 mm focal length, and magnification M=-3.3 the radius of the spherical aberration disk is 6 nm.",

author = "M. Szilagyi",

year = "1986",

doi = "10.1063/1.97541",

language = "English (US)",

volume = "49",

pages = "767--769",

journal = "Applied Physics Letters",

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publisher = "American Institute of Physics",

number = "13",

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T1 - Electrostatic lenses with very small spherical aberration

AU - Szilagyi, M.

PY - 1986

Y1 - 1986

N2 - A class of electrostatic lenses with extremely low spherical aberration is proposed. The axial potential distribution of these lenses has an asymmetric bell-shaped form with a lower potential on the image side. A lens with C so∞/fo=0.51 is presented as an example. The maximum required electrode voltage is only five times larger than the initial accelerating voltage. At 5 mrad acceptance half-angle, 51 mm focal length, and magnification M=-3.3 the radius of the spherical aberration disk is 6 nm.

AB - A class of electrostatic lenses with extremely low spherical aberration is proposed. The axial potential distribution of these lenses has an asymmetric bell-shaped form with a lower potential on the image side. A lens with C so∞/fo=0.51 is presented as an example. The maximum required electrode voltage is only five times larger than the initial accelerating voltage. At 5 mrad acceptance half-angle, 51 mm focal length, and magnification M=-3.3 the radius of the spherical aberration disk is 6 nm.

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UR - https://www.scopus.com/pages/publications/33947314463#tab=citedBy

U2 - 10.1063/1.97541

DO - 10.1063/1.97541

M3 - Article

AN - SCOPUS:33947314463

SN - 0003-6951

VL - 49

SP - 767

EP - 769

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 13

ER -

Electrostatic lenses with very small spherical aberration

Abstract

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