Electron radiation sensitive hybrid sol-gel materials for electron-beam lithography and diffractive optics

J. T. Rantala, R. S. Penner, S. Honkanen, N. Nordman, O. Nordman, J. Vähäkangas, M. Fallahi, N. Peyghambarian

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations

Fingerprint

Dive into the research topics of 'Electron radiation sensitive hybrid sol-gel materials for electron-beam lithography and diffractive optics'. Together they form a unique fingerprint.

Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds