@inproceedings{32a5531c16a24f8a98f8066c19aa9111,
title = "Electrodeposited micro-actuators: A simple tool for impedance-based sensing",
abstract = "This paper is focused on the design of metal (Ni) electro-thermal micro-actuators, fabricated via a single electro-plating step. Analytical and finite-element solutions of the electro-thermal and thermo-elastic problems are presented to aid in the design of the devices. A separate section is devoted to the problem of displacement determination using charge sensitive amplifiers for high-precision capacitance measurements. Finally, a possible future use of these actuators in impedance-based biosensors is outlined. copyright The Electrochemical Society.",
author = "Enikov, {E. T.}",
year = "2006",
doi = "10.1149/1.2357274",
language = "English (US)",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "10",
pages = "339--350",
booktitle = "Chemical Sensors 7 -and- MEMS/NEMS 7",
edition = "10",
note = "Chemical Sensors 7 -and- MEMS/NEMS 7 - 210th Electrochemical Society Meeting ; Conference date: 29-10-2006 Through 03-11-2006",
}