Electrochemical impedance spectroscopic characterization of hydrophobic coatings deposited onto pre-oxidized silicon

Angeles Marcia Almanza-Workman; Srini Raghavan; Pierre Deymier; Slobodan Petrovic; David J. Monk; Ray Roop

doi:10.4028/www.scientific.net/ssp.92.211

Electrochemical impedance spectroscopic characterization of hydrophobic coatings deposited onto pre-oxidized silicon

Angeles Marcia Almanza-Workman, Srini Raghavan, Pierre Deymier, Slobodan Petrovic, David J. Monk, Ray Roop

Research output: Contribution to journal › Conference article › peer-review

Abstract

Water-dispersible organosilanes have been used to apply highly hydrophobic coatings onto pre-oxidized silicon with the ultimate goal of using this technique to prevent or reduce release as well as in-use stiction in micro-electromechanical structures. The ability of the hydrophobic films to provide a barrier to liquid penetration has been investigated by electrochemical impedance spectroscopy in hydrofluoric acid (HF) solutions. The results have been analyzed using equivalent circuits.

Original language	English (US)
Pages (from-to)	211-214
Number of pages	4
Journal	Solid State Phenomena
Volume	92
DOIs	https://doi.org/10.4028/www.scientific.net/ssp.92.211
State	Published - 2003
Event	The International Symposium on Ultra Clean Processing of Silicon Surfaces V - Ostend, Belgium Duration: Sep 16 2002 → Sep 18 2002

Keywords

Electrochemical impedance spectroscopy
Hydrophobic coatings
Water-dispersible organosilanes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
General Materials Science
Condensed Matter Physics

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Cite this

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title = "Electrochemical impedance spectroscopic characterization of hydrophobic coatings deposited onto pre-oxidized silicon",

abstract = "Water-dispersible organosilanes have been used to apply highly hydrophobic coatings onto pre-oxidized silicon with the ultimate goal of using this technique to prevent or reduce release as well as in-use stiction in micro-electromechanical structures. The ability of the hydrophobic films to provide a barrier to liquid penetration has been investigated by electrochemical impedance spectroscopy in hydrofluoric acid (HF) solutions. The results have been analyzed using equivalent circuits.",

keywords = "Electrochemical impedance spectroscopy, Hydrophobic coatings, Water-dispersible organosilanes",

author = "Almanza-Workman, {Angeles Marcia} and Srini Raghavan and Pierre Deymier and Slobodan Petrovic and Monk, {David J.} and Ray Roop",

year = "2003",

doi = "10.4028/www.scientific.net/ssp.92.211",

language = "English (US)",

volume = "92",

pages = "211--214",

journal = "Solid State Phenomena",

issn = "1012-0394",

publisher = "Trans Tech Publications Ltd",

note = "The International Symposium on Ultra Clean Processing of Silicon Surfaces V ; Conference date: 16-09-2002 Through 18-09-2002",

}

TY - JOUR

T1 - Electrochemical impedance spectroscopic characterization of hydrophobic coatings deposited onto pre-oxidized silicon

AU - Almanza-Workman, Angeles Marcia

AU - Raghavan, Srini

AU - Deymier, Pierre

AU - Petrovic, Slobodan

AU - Monk, David J.

AU - Roop, Ray

PY - 2003

Y1 - 2003

N2 - Water-dispersible organosilanes have been used to apply highly hydrophobic coatings onto pre-oxidized silicon with the ultimate goal of using this technique to prevent or reduce release as well as in-use stiction in micro-electromechanical structures. The ability of the hydrophobic films to provide a barrier to liquid penetration has been investigated by electrochemical impedance spectroscopy in hydrofluoric acid (HF) solutions. The results have been analyzed using equivalent circuits.

AB - Water-dispersible organosilanes have been used to apply highly hydrophobic coatings onto pre-oxidized silicon with the ultimate goal of using this technique to prevent or reduce release as well as in-use stiction in micro-electromechanical structures. The ability of the hydrophobic films to provide a barrier to liquid penetration has been investigated by electrochemical impedance spectroscopy in hydrofluoric acid (HF) solutions. The results have been analyzed using equivalent circuits.

KW - Electrochemical impedance spectroscopy

KW - Hydrophobic coatings

KW - Water-dispersible organosilanes

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UR - http://www.scopus.com/inward/citedby.url?scp=0038377582&partnerID=8YFLogxK

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DO - 10.4028/www.scientific.net/ssp.92.211

M3 - Conference article

AN - SCOPUS:0038377582

SN - 1012-0394

VL - 92

SP - 211

EP - 214

JO - Solid State Phenomena

JF - Solid State Phenomena

T2 - The International Symposium on Ultra Clean Processing of Silicon Surfaces V

Y2 - 16 September 2002 through 18 September 2002

ER -

Electrochemical impedance spectroscopic characterization of hydrophobic coatings deposited onto pre-oxidized silicon

Abstract

Keywords

ASJC Scopus subject areas

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