TY - GEN
T1 - Effects of Stress Induced by the Underlying Layers on the Micro-Structures and Characteristic Phase Transformation Temperatures of Sputtered TiNi Thin Films
AU - Wang, Rong Xin
AU - Zohar, Yitshak
AU - Wong, Man
PY - 2001
Y1 - 2001
N2 - The micro-structures and the phase transformation temperatures of sputtered titanium-nickel (TiNi) thin films, both free-standing and attached on different underlying multilayer substrates have been studied. Differences in the micro-structures, such as the lattice constants and the relative concentrations of TiNi, Ti2Ni and TiNi3 phases, were observed (1) among the free-standing and the attached films, (2) among the films attached on different underlying multi-layers and (3) among films with different relative orders of aging and release. Not surprisingly, the corresponding phase transformation temperatures are also different. It is proposed that both substrate- and process-induced stress significantly affect the micro-structures, hence the phase transformation characteristics, of the resulting shape-memory alloy thin films.
AB - The micro-structures and the phase transformation temperatures of sputtered titanium-nickel (TiNi) thin films, both free-standing and attached on different underlying multilayer substrates have been studied. Differences in the micro-structures, such as the lattice constants and the relative concentrations of TiNi, Ti2Ni and TiNi3 phases, were observed (1) among the free-standing and the attached films, (2) among the films attached on different underlying multi-layers and (3) among films with different relative orders of aging and release. Not surprisingly, the corresponding phase transformation temperatures are also different. It is proposed that both substrate- and process-induced stress significantly affect the micro-structures, hence the phase transformation characteristics, of the resulting shape-memory alloy thin films.
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M3 - Conference contribution
AN - SCOPUS:1542642471
SN - 0791835553
T3 - American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)
SP - 377
EP - 381
BT - Micro-Electro-Mechanical Systems (MEMS) - 2001
A2 - Lee, A.L.
A2 - Simon, J.
A2 - Breuer, K.
A2 - Chen, S.
A2 - Keynton, R.S.
A2 - Malshe, A.
A2 - Mou, J.-I.
A2 - Dunn, M.
T2 - 2001 ASME International Mechanical Engineering Congress and Exposition
Y2 - 11 November 2001 through 16 November 2001
ER -