Effects of object roughness on partially coherent image formation

Neil A. Beaudry; Tom D. Milster

doi:10.1364/OL.25.000454

Effects of object roughness on partially coherent image formation

Neil A. Beaudry, Tom D. Milster

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

Phase perturbations in the object plane of a partially coherent imaging system are found to produce artifacts in the aerial image. It is demonstrated that phase perturbations of as little as λ/30 rms can produce visible deformation in the final image for modest coherence factors, such as σ_c = 0.4. A combination of simulation and experiment is used to demonstrate the effects. Application to line-edge roughness in lithography is described.

Original language	English (US)
Pages (from-to)	454-456
Number of pages	3
Journal	Optics letters
Volume	25
Issue number	7
DOIs	https://doi.org/10.1364/OL.25.000454
State	Published - Apr 1 2000

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1364/OL.25.000454

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title = "Effects of object roughness on partially coherent image formation",

abstract = "Phase perturbations in the object plane of a partially coherent imaging system are found to produce artifacts in the aerial image. It is demonstrated that phase perturbations of as little as λ/30 rms can produce visible deformation in the final image for modest coherence factors, such as σc = 0.4. A combination of simulation and experiment is used to demonstrate the effects. Application to line-edge roughness in lithography is described.",

author = "Beaudry, \{Neil A.\} and Milster, \{Tom D.\}",

year = "2000",

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AU - Beaudry, Neil A.

AU - Milster, Tom D.

PY - 2000/4/1

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N2 - Phase perturbations in the object plane of a partially coherent imaging system are found to produce artifacts in the aerial image. It is demonstrated that phase perturbations of as little as λ/30 rms can produce visible deformation in the final image for modest coherence factors, such as σc = 0.4. A combination of simulation and experiment is used to demonstrate the effects. Application to line-edge roughness in lithography is described.

AB - Phase perturbations in the object plane of a partially coherent imaging system are found to produce artifacts in the aerial image. It is demonstrated that phase perturbations of as little as λ/30 rms can produce visible deformation in the final image for modest coherence factors, such as σc = 0.4. A combination of simulation and experiment is used to demonstrate the effects. Application to line-edge roughness in lithography is described.

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DO - 10.1364/OL.25.000454

M3 - Article

C2 - 18064077

AN - SCOPUS:0007960523

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VL - 25

SP - 454

EP - 456

JO - Optics letters

JF - Optics letters

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ER -

Effects of object roughness on partially coherent image formation

Abstract

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